Busnaina, Ahmed, Nanomanufacturing Handbook, Taylor and Francis Group, CRC Press, 2007, ISBN 0-8493-3326-1.

Book Chapters and Report Contributions
  1. Busnaina, A.,  “Introduction to Nanomanufacturing,” Handbook of Nanoscience, Engineering, and Technology, 3rd Edition, Goddard et al., (eds.) Taylor and Francis Group, CRC Press, 2012.
  2. Young Lae Kim, Laila Jaber‐Ansari, Hailong Wang, Xugang Xiong, Sivasubramanian Somu, Ahmed Busnaina, Moneesh Upmanyu, Yung Joon Jung, Mark C. Strus, Ann N. Chiaramonti, Robert R. Keller, Swastik Kar, "Highly Organized Single-Walled Carbon Nanotube Networks and Their Electrical Transport Properties,"    Dekker Encyclopedia of Nanoscience and Nanotechnology, CRC, 25 June, 2012  DOI: 10.1081/E-ENN2-120048411
  3. Park, Jin-Goo,  Busnaina, Ahmed A., and  Hong, Yi-Koan,  “Post CMP Cleanings,” Microelectronic Applications of Chemical Mechanical Planarization, Yuzhuo Li, (ed.), 2007. Wiley, DOI: 10.1002/9780470180907.ch16.
  4. Busnaina, A.,  “Introduction to Nanomanufacturing,” Handbook of Nanoscience, Engineering, and Technology, 2nd Edition, Goddard et al., (eds.) Taylor and Francis Group, CRC Press, 2007.
  5. Busnaina, Ahmed, Park, Jingoo  and Bakhtari, Kaveh, “Particle Deposition and Adhesion,“ Handbook of Silicon Wafer Cleaning Technology, 2nd Edition., K. Reinhardt and W. Kern (eds.), William Andrew Publishing, Norwich, NY (2006).
  6. Busnaina, A. and   Bakhtari, K., “Nanoscale Defects and Surface Preparation in Nanomanufacturing,” Nanomanufacturing Handbook,    Busnaina, A. (ed.), Taylor & Francis Group LLC, Boca Raton, FL, September, 2006.       
  7. Busnaina, A.,  “Introduction to Nanomanufacturing,”  Nanomanufacturing Handbook,    Busnaina, A. (ed.), Taylor & Francis Group LLC, Boca Raton, FL, September, 2006.
  8. “Projected Impact of Nanomaterials by Design in the Chemical Industry,” Report, Los Alamos National Lab, Chemical Industry Vision2020 Technology Partnership, March 2006.
  9. Busnaina, A., and Mead, J., “Nanotechnology and Manufacturing,”  Nanotechnology in Massachusetts; Report on Nano-scale R&D and its Implications for the Massachusetts Economy, Mass Tech Collaborative and the Nano Science and Tech Institute, 2004, pp.10-11.
  10. Busnaina, A.A. and Elsawy, T., "The Effect of Relative Humidity on Particle Adhesion and Removal," Particle Adhesion: Applications and Advances, Quesnel, D., Rimai, D. and Sharpe, L., (eds.), Taylor and Francis, New York, New York, 2001, pp. 391-410.
  11. Busnaina, A. A., and Lin, H., “Surface Cleaning; Physical Removal of Micro and Nanoscale Particles,“ Global Semiconductor Manufacturing Technology, WMRC, London, England, January, 2001.
  12. Busnaina, A. A., “Surface Cleaning: Particle Removal,” Critical Cleaning  Handbook, edited by B. Kanegsberg, CRC Press, 2001.
  13. Busnaina, A. A. and  Dai,  F.,  “The Removal of Submicron Particles in  Liquid-based Cleaning,” Fundamentals of Adhesion and Interfaces, edited by L. P. DeMejo, D. S. Rimai and L. Sharpe, Gordon and Breach,  1999, pp. 181-193.
  14. Busnaina, A. A., "Particle-substrate Collisions, Particle Rebound and Removal," Advances in Particle Adhesion, edited by D. S. Rimai and L. Sharpe, Gordon and Breach,  1995, pp. 167-180.
  15. Krishnan, S., Busnaina, A. A., Rimai, D. S. and DeMejo, L. P., "The Adhesion-induced Deformation and the Removal of Submicrometer Particles," Fundamentals  of  Adhesion and Interfaces, edited by D. S. Rimai, L. P. DeMejo and K. L. Mittal, VSP BV press, The Netherlands,  1995, pp. 95-108.
  16. Abuzeid, S. and Busnaina, A. A., "Deposition of Submicron Particles on Surfaces, Part I: Electrostatic Effect," Particles in Gases and Liquids, edited by K. Mittal, vol. 3, Plenum Press, New York, NY, 1992.
  17. Abuzeid, S. and Busnaina, A. A., "Deposition of Submicron Particles on Surfaces, Part II: Turbulence Effect," Particles in Gases and Liquids, edited by K. Mittal, vol. 3, Plenum Press, New York, NY, 1992.
  18. Busnaina, A. A., Kashkoush, I., Kern, F. W. and Kunesh, R. F., "Ultrasonic Cleaning of Surfaces: An Overview," Particles on Surfaces, edited by K. Mittal, vol. 3, Plenum Press, New York, NY, 1991, pp. 217‑237.
  19. Saviz, C. and Busnaina, A. A., "Measurement of Submicron Particle Deposition on Silicon Wafers in a Cleanroom Environment," Particles in Gases and Liquids, edited by K. Mittal, vol. 2, Plenum Press, New York, NY, 1990, pp. 179‑194.
  20. Busnaina, A. A., Sharif, M.A.R., Gale, G. and Kern, F., "A Fluid Dynamics Study of a Microcontaminant Particles Removal Process," Particles in Gases and Liquids, edited by K. Mittal, vol. 1, Plenum Press, New York, NY, 1989, pp. 235‑257.
  21. Sharif, M. A. R. and Busnaina, A. A., "Prediction of Lateral Jets in Swirling Crossflow," Numerical Methods in Laminar and Turbulent Flow, edited by Taylor, Habashi and Hafez, vol. I, Pineridge Press, Swansea, UK, 1987, pp. 374‑385.
  22. Vatistas, G. H., Busnaina A. A. and Lilley D. G., "A Simple Code for Laminar or Turbulent Flowfield Predictions with Applications," Computational Methods and Experimental Measurements, edited by C. Brebbia, et al., Springer‑Verlag, 1986, pp.177-188.

  Journal Articles

  1. Leanne M. Gilbertson, Ahmed A. Busnaina , Jacqueline A. Isaacs, Julie B. Zimmerman , and Matthew J. Eckelman, “Life Cycle Impacts and Benefits of a Carbon Nanotube-Enabled Chemical Gas Sensor,”  Environ. Sci. Technol., (Web): September 4, 2014,
  2. Cihan Yilmaz , Arif E. Cetin , Georgia Goutzamanidis , Jun Huang , Sivasubramanian Somu , Hatice Altug , Dongguang Wei , and Ahmed Busnaina, “Three-Dimensional Crystalline and Homogeneous Metallic Nanostructures Using Directed-Assembly of Nanoparticles,” ACS Nano, April 16, 2014,
  3. Paul Su, Babak H. Jahromi, William Doerr, Zahra Karimi, Syed Hassan, Louis Gritzo, A. Busnaina and Ashkan Vaziri,  "Decontamination of Surfaces Exposed to Carbon-based Nanotubes and Nanomaterials," J. of Nanomaterials. (in press)
  4. Mehmet Nurullah Ates   Sanjeev Mukerjee, Ankita Shah and  Ahmed Busnaina,  "Mitigation of Layered to Spinel Conversion of a Li-rich Layered Metal Oxide Cathode Material for Li-ion Batteries," J. of  Electrochem  Soc. (in press)
  5. JuKyung Lee, SiHyeong Cho, JungHwan Lee, HeonYul Ryu, JinGoo Park, SunHee Lim, ByungDo Oh, ChangWoo Lee, Wilber Huang, Ahmed Busnaina  and HeaYeon Lee, “Wafer-scale nanowell array patterning based electrochemical impedimetric immunosensor,” J. of Biotechnology, Vol. 168, Issue 4, December 2013, pp. 584–588.
  6. Hyun Young Jung,   Young Lae Kim,   Sora Park,   Aniket A Datar,   Hyung–June Lee,   Jun Huang,   Sivasubramanian Somu,   Ahmed Busnaina,   Yung Joon Jung and    Young-Kyun Kwon,  "A high-performance H2S detection by redox reactions in semiconducting carbon nanotube-based devices," Analyst, 138,  December 2013, Issue 23,  pp.7206-7211 
  7. Tae-Young Kwon, Manivannan Ramachandran, Byoung-Jun Cho, Ahmed A. Busnaina, Jin-Goo Park, “The Impact of Diamond Conditioners on Scratch Formation during Chemical Mechanical Planarization (CMP) of Silicon Dioxide,” Tribology Int’l, Tribology International, Volume 67, November 2013, pp. 272-277.
  8. Tae-Hoon Kim, Cihan Yilmaz, Sivasubramanian Somu, and Ahmed Busnaina, "3-D Perpendicular Assembly of SWNTs for CMOS Interconnects," Electronic Materials Letters, November 2013, Vol 9, Issue 6, pp 763-766.
  9. Jinyoung Lee, Ju-Kyoung Lee,  Bae Ho Park, Ahmed Busnaina, and Hea Yeon Lee, “Acceleration of Poly(L-Lactide) Degradation by TiO2 Nanoparticles in Sunlight,J. of Nanoscience and Nanotechnology, Vol 13, 10, Oct  2013. pp. 6983-6987(5)
  10. Ahmed A. Busnaina, Joey Mead, Jacqueline Isaacs and Sivasubramanian Somu, “Nanomanufacturing and Sustainability: Opportunities and Challenges,” J. of Nanoparticle Research, Vol. 15, September 2013, pp. 1984-8
  11. Tae Hoon Kim, Hanchul Cho,  Ahmed Busnaina, Jin-Goo Park and  Dongsik Kim, “Shockwave-induced deformation of organic particles during laser shockwave cleaning,”  J. of Appl Phys, Vol.114 ,  Issue 6, Aug 2013, pp. 063104 (4).
  12. Jungho Seo, Hanchul Cho, Ju-kyung Lee, Jinyoung Lee, Ahmed Busnaina, and HeaYeon Lee, “Double oxide deposition and etching nanolithography for wafer-scale nanopatterning with high-aspect-ratio using photolithography,”  Appl. Phys. Lett. 103, Issue 3, July 2013, pp.033105 (5).  
  13. Jun Huang, Sivasubramanian Somu, and Ahmed Busnaina, “Spin coating fabrication of thin film transistors using enriched semiconducting SWNT solution,” Electronic Materials Letters, July 2013, Vol 9, Issue 4, pp 505-507.
  14. Guangxu Li, Cihan Yilmaz, Xiaohong An, Sivasubramanian Somu, Swastik Kar, Yung Joon Jung, Ahmed Busnaina, and Kai-Tak Wan, “Adhesion of graphene sheet on nano-patterned substrates with nano-pillar array,” J. Appl. Phys. Vol. 113, Issue 24,  June 2013, pp. 244303 (5).
  15. Tae-Young Kwon, Byoung-Jun Cho, Manivannan Ramachandran, Ahmed A.
    Busnaina, Jin- Goo Park, “Investigation of Source-Based Scratch Formation During Oxide Chemical Mechanical Planarization,” Tribology Lett, May 2013, Vol. 50, Issue 2, pp 169-175.
  16. Jia Shen,  Ming Wei, Ahmed Busnaina, Carol Barry, and Joey Mead,   “Directed assembly of conducting polymers on sub-micron templates by electrical fields,”  J. of Materials Science and Engineering: B, Vol. 178, Issue 3, 20 February 2013, pp. 190–201.
  17. Jinyoung Lee, Joo-Kyung Lee, Ahmed Busnaina, BaeHo Park and HeaYeon Lee, “Phospholipase-Catalyzed Hydrolysis in an Artificial Cell Membrane in the Presence of Melittin,J. Nanoscience. Nanotechnology. Vol. 13, Issue 1, Jan 2013, pp. 144-148.
  18. Jung Hwan Lee, Si Hyeong Cho, Hyun Woo Lim, Sung Woo Kim, Ahmed A. Busnaina, Hea Yeon Lee, and Jin Goo Park, “Study of Highly Selective and Sensitive Microarray Structure Based on Hydrophilic/Hydrophobic SAMs (Self-Assembled Monolayers),” Solid State Phenomena, Vol.195, Dec 2012, pp. 82-85.
  19. Ji Hyun Jeong, Bong Kyun Kang, Min Su Kim, Hong Seong Sohn, Ahmed A. Busnaina, and Jin Goo Park, “Evaluation of Very Dilute Alkaline Solutions for Wafer Cleaning with Megasonic Irradiation,” Solid State Phenomena, Vol.195, Dec 2012, pp.181-184
  20. Bong Kyun Kang, Ji Hyun Jeong, Min Su Kim, Hong Seong Sohn, Ahmed A. Busnaina, and Jin Goo Park, “Acoustic Cavitation Behavior in Isopropyl Alcohol Added Cleaning Solution,Solid State Phenomena, Vol.195, Dec 2012, pp169-72.
  21. Tae Hoon Kim, Ahmed Busnaina, Jin-Goo Park and Dongsik Kim, “Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning,ECS, J. Solid State Sci. Technol. 2012 vol. 1, issue 2, pp.70-77.
  22. Eui-Seong CHOI, Jinwoo SUNG, Qi-min WANG, Kwang-Ho KIM, Ahmed BUSNAINA and Myung Chang KANG,  “Material properties and machining performance of hybrid Ti2AlN bulk material for micro electrical discharge machining,”  Transactions of Nonferrous Metals Society of China, Vol 22, 3, Dec  2012, pp s781–s786.
  23. Joo-Kyung Lee, Si-Hyeong Cho, Jinyoung Lee, Jung-Hwan Lee, Ah Young Kim,
    a. Bae Ho Park, Jin-Goo Park, Ahmed Busnaina and Hea Yeon Lee, “Detection of Single Nucleotide Polymorphisms Using a Biosensor-Containing Titanium-Well Array,” J of Nanoscience and Nanotechnology,Vol. 12, 1–5, 2012
  24. Asanterabi Malima, Salome Siavoshi, Tiziana Musacchio, Jaydev Upponi, Cihan Yilmaz, Sivasubramanian Somu,  William Hartner,  Vladimir Torchilin  and Ahmed Busnaina, “Highly sensitive microscale in vivo sensor enabled by electrophoretic assembly of nanoparticles for multiple biomarker detection,Lab on a Chip, 2012,12, 4748-4754.
    a. DOI: 10.1039/C2LC40580F 
  25. Huang J., Datar A., Somu S. and Busnaina, A., "A molybdenum disulfide/carbon nanotube heterogeneous complementary inverter", Nanotechnology, Vol 23, 335203 (2012).
  26. Huang J., Datar A., Somu S. and Busnaina, A.,  "Modulating the performance of carbon nanotube field-effect transistors via Rose Bengal molecular doping", Nanotechnology, Vol. 22, 455202 (2011).
  27. Byoung Kyoo Park, Namwoo Yi, Jaesung Park, Tae Choi, Jin Young Lee, Ahmed Busnaina, and Dongsik Kim, "Thermal conductivity of bovine serum albumin: A tool to probe denaturation of protein," Appl. Phys. Lett. 99, 163702 (2011).
  28. M. G. Hahm, Y. Kwon, A. Busnaina and Y. J. Jung, "Structure Controlled Synthesis of Vertically Aligned Carbon Nanotubes using Thermal Chemical Vapor Deposition Process", J of Heat Transfer, 133,  2011, pp. 031001-4.  
  29. Bo Li , Hyun Young Jung , Hailong Wang , Young Lae Kim , Taehoon Kim , Myung  Gwan Hahm , Ahmed Busnaina , Moneesh Upmanyu ,  and Yung Joon Jung, "Ultra-thin SWNTs Films with Tunable, Anisotropic Transport Properties", Advanced Functional Materials, 21, 2011, pp. 1810-1815. 
  30. Salome Siavoshi, Cihan Yilmaz, Sivasubramanian Somu, Tiziana Musacchio, Jaydev Upponi,   Vladimir Torchilin, and Ahmed Busnaina, "Size-Selective Template-assisted Electrophoretic Assembly of Nanoparticles for Biosensing Applications,"  J. of ACS, Langmuir, 27, pp. 7301-03 (2011).
  31. A.E. Cretin, Ahmet Ali Yanik, Cihan Yilmaz,  S. Somu, A. Busnaina and  H. Altug, “Monopole antenna arrays for optical trapping, spectroscopy, and sensing,” Appl Phys Lett, Vol. 98, Issue 11, March 2011, pp. 111110-3.    
  32. In-Kwon Kim, Y. Nagendra Prasad, Tae-Young Kwon, Hyuk-Min Kim, Ahmed A. 
    a. Busnaina, and Jin-Goo Park, “Citric Acid and NaIO4 Based Alkaline Cleaning Solution for Particle Removal during Post-Ru CMP Cleaning,” Semiconductor Devices, Materials, and Processing, J. Electrochem. Soc., Volume 158, 10, pp. H1052-H1056 (2011)
  33. S. Selvarasah, A.  Busnaina and  M.R. Dokmeci, “Design, Fabrication, and Characterization of Three-Dimensional Single-Walled Carbon Nanotube Assembly and Applications As Thermal Sensors,”  Nanotechnology, IEEE Transactions, Vol. 10 ,  Issue 1,  Jan. 2011, pp. 13 – 20. Within%3Dp_Last_Names%3ABUSNAINA%26matchBoolean%3Dtrue%26queryText%3D%28p_Authors%3ABUSNAINA%2C+AHMED%29
  34. Yilmaz, Cihan, Kim, Tae-Hoon, Somu, Sivasubramanian and Busnaina, Ahmed A.,
    a. “Large-Scale Nanorods Nanomanufacturing by Electric-Field-Directed Assembly for Nanoscale Device Applications,” Nanotechnology, IEEE Transactions, VOL. 9, NO. 5, September 2010, pp.653-658.
    b. sp=null&asf_pn=3
  35. Selvarasah, S., Busnaina, A. and Dokmeci, M. R., "Parylene-C Passivated Carbon
    a. Nanotube Flexible Transistors," Appl Phys Letts, Vol. 97, Issue 15, Oct 2010, pp. 153120-3.
    b.(This paper was also selected for publication in the October 18th, 2010 issue of the Virtual Journal of Nanoscale Science and Technology).
  36. Liberman, V., Yilmaz, C., Bloomstein, T. M., Somu, S.,  Echegoyen, Y., Busnaina, A., Cann, S. G.,  Krohn, K. E., Marchant, M. F. and  Rothschild,  M., “A Nanoparticle Convective Directed Assembly Process for the Fabrication of Periodic Surface Enhanced Raman Spectroscopy Substrates,Advanced Materials,  Volume 22, Issue 38, pages 4298–4302, October 8, 2010.
  37. Somu, Sivasubramanian,  Wang, Hailong, Kim, Younglae,  Jaberansari, Laila, Hahm,  Myung Gwan, Li, Bo,  Kim, Taehoon, Xiong, Xugang, Jung, Yung Joon, Upmanyu, Moneesh and Busnaina, Ahmed, “Topological Transitions in Carbon Nanotube Networks via Nanoscale Confinement,ACS Nano, Vol. 4, Issue 7, July 2010, pp. 4142-4148.
  38. Hu, S., Kim, T.H, Park, J.G, and Busnaina, A. A., “Effect of Different Deposition Mediums on the Adhesion and Removal of Particles,” J. of Electrochem Soc., 157 (6), (2010).
  39. Chia-Ling Chen, Chih-Feng Yang, Vinay Agarwal, Taehoon Kim, Sameer Sonkusale, Ahmed Busnaina, Michelle Chen and Mehmet R Dokmeci, “DNA-decorated Carbon-Nanotube-Based Chemical Sensors On Complementary Metal Oxide Semiconductor Circuitry,”  Nanotechnology, 21 (2010) 095504 (8pp). doi: 10.1088/0957-4484/21/9/095504       
  40. Kim, Tae-Gon, Wostyn, Kurt, Mertens, Paul, Busnaina, Ahmed, and Park, Jin-Goo, “Collapse Behavior And Forces Of Multistack Nanolines,” Nanotechnology 21 (2010) 015708 (7pp).
  41. Jae-Gon Choi, Y. Nagendra Prasad, In-Kwon Kim, In-Gon Kim, Woo-Jin Kim, Ahmed A. Busnaina and Jin-Goo Park, "Analysis of Scratches Formed on Oxide Surface during Chemical Mechanical Planarization", J. of The Electrochem Soc, 157 (2) H186-H191 (2010).
  42. Pegah Karimi, Taehoon Kim,  Juan Aceros,  Jingoo Park and  Ahmed A. Busnaina, “The Removal of Nanoparticles from Submicron Trenches Using Megasonics,Microelectronic Engg, 87 (2010) pp. 1665–1668.
  43. Y. L. Kim, B. Li, X. An, M. G. Hahm, L. Chen, M. Washington, P. M. Ajayan, S. K. Nayak, A. Busnaina, S. Kar, and Y. J. Jung, "Highly Aligned Scalable Platinum-decorated Single-wall Carbon Nanotube Arrays for Nanoscale Electrical Interconncets", ACS Nano, 3, 2818-2826 (2009).
  44. Park, Jin-Goo, Prasad, Y. Nagendra,  Kang, Young-Jae, Kim, In-Kwon, Hong, Yi-Koan, Han, Sang-Yeob,  Yun, Seong-Ky,  Yoon, Bo-Un and Busnaina, Ahmed A., “Effect of Polysilicon Wettability on Polishing and Organic Defects during CMP,”  J. of The Electrochem Soc, 156 (11), pp. H869-H873 (2009).
  45. Xiong, X.,  Chen, C.-L., Ryan, P., Busnaina, A. A., Jung, Y. J. and Dokmeci, M. R.,  "Directed Assembly of High-density Single-Walled Carbon Nanotube Patterns on Flexible Polymer Substrates," Nanotechnology, 20, pp. 295302-308, July 2009. 
    a. Downloaded 250 times as of  August 11, 2009. Across all IOP journals, only 10% of articles were accessed over 250 times this quarter (July-Aug 2009).
    b.  This article was featured as news item in Small (news from the micro-nano world), Vol. 5, Issue 16, pp. 1814-15.
  46. Cha, Nam-Goo, Echegoyen, Yolanda, Kim,  Tae-Hoon, Park, Jin-Goo and Busnaina,  Ahmed A.,  “Convective Assembly and Dry Transfer of Nanoparticles Using Hydrophobic/Hydrophilic Monolayer Templates,” Langmuir, J. of ACS, 2009, 25 (19), pp.11375–11382
  47. Jaber-Ansari, Laila, Hahm, Myung Gwan,Kim, Tae Hoon,  Somu, Sivasubramanian, Busnaina, Ahmed  and  Jung, Yung Joon, “Large Scale highly Organized Single-walled Carbon Nanotube Networks for Electrical Devices,” Appl Phys A (5194), Springer-Verlag 2009, Published Online: April 3, 2009, pp. 373-377
    a. DOI: 10.1007/s00339-009-5194-2
  48. Jaber-Ansari, Laila, Hahm, Myung Gwan, Somu, Sivasubramanian, Echegoyen Sanz, Yolanda, Busnaina, Ahmed and Jung, Yung Joon,  “Mechanism of Very Large Scale Assembly of SWNTs in Template Guided Fluidic Assembly Process,”  J. Am. Chem. Soc., 2009, 131 (2), pp 804–808. 
  49. Kim, Tae-Gon, Wostyn, Kurt, Park, Jin-Goo, Mertens, Paul and  Busnaina, Ahmed A., “Pattern Collapse and Particle Removal Forces of Interest to Semiconductor Fabrication Process,Solid State Phenomena, Vols. 145-146 (2009) pp 47-50. Online: Jan 06, 2009.
  50. Ming Wei, Liang Fang, Jun Lee, Sivasubramanian Somu, Xugang Xiong, Carol Barry, Ahmed Busnaina, Joey Mead, “Directed Assembly of Polymer Blends Using Nanopatterned Templates,”  Advanced Materials, Vol. 21, No. 7,  Feb 16, 2009, pp. 794 – 798.
    a. selected.y=8
  51. Gultepe, Evin, Nagesha, Dattatri,   Casse, Bernard Didier Frederic,  Selvarasah, Selvapraba,  Busnaina, Ahmed  and  Sridhar, Srinivas, “Large scale 3D vertical assembly of single-wall carbon nanotubes at ambient temperatures,” Nanotechnology, 19 (45), p.455309 (5pp), Nov 2008, doi:10.1088/0957-4484/19/45/455309.
  52. Kim, Tae-Gon, Yoo, Young-Sam, Ahn, Jinho, Lee, Jong-Myoung, Choi, Jae-Sung, Busnaina, Ahmed A. and Park, Jin-Goo, “Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave,” J. of Microelectronic Engg, DOI: 10.1016/j.mee.2008.10.016, online: 5-NOV-2008.
    a. &_user=10&_rdoc=1&_fmt=&_orig=search&_sort=d&view=c&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=8e7f5f3415 ffcdfead7b311fa1449d40
  53. Xiong, Xugang and Busnaina, Ahmed, “Direct assembly of nanoparticles for large-scale fabrication of nanodevices and structures,” J. of Nanoparticle Research,  Vol 10, 6, August, 2008, pp. 947-954.  
  54. Selvarasah, S., Chao, S. H., Chen, C.-L., Sridhar, S.,  Busnaina, A., Khademhosseini, A., and Dokmeci, M. R., “A Reusable High Aspenct Ratio Parylene-C Shadow Mask Technology for Diverse Micropatterning Applications,” Sensors and Actuators A: Physical, vol. 145-46, pp. 306-315, 2008.
  55. Kim, Tae-Gon, Yoo, Young-Sam, Kim, Tae-Geun,  Ahn, Jinho,  Lee, Jong-Myoung, Choi, Jae-Sung, Busnaina, Ahmed A  and Park, Jin-Goo, "Damage Free Particle Removal from Extreme Ultraviolet Lithography Mask Layers by High Energy Laser Shock Wave Cleaning," Japanese J. of Appl Phys, Vol. 47, No. 6, 2008, pp. 4886–4889.
  56. Chandekar, Amol, Alabran, Michael, Sengupta, Sandip K., Lee, Jun S.,  Mead, Joey L., Barry, Carol M.F., Whitten, James E., Somu, Sivasubramanian, and  Busnaina, Ahmed A., “Fabrication of stamps for microcontact printing by injection molding,” Microelectronic Engineering, Vol. 85, (2008), pp.187–194.
    a. &_user=10&_coverDate=01%2F31%2F2008&_
  57. Xiong, Xugang, Jaberabsari, Laila, Hahm, Myung Gwan, Busnaina, Ahmed, and Jung, Yung, Joon Jung, “Building Highly Organized Single-Walled-Carbon-Nanotube Networks Using Template-Guided Fluidic Assembly,” Small, 2007, vol. 3, issue 12, December 3, 2007, pp. 2006-2010.
  58. Makaram, Prashanth, Selvarasah, Selvapraba,  Xiong, Xugang, Chen, Chia-Ling, Busnaina, Ahmed, Khanduja Nishant,  and Dokmeci, Mehmet R, “Three-dimensional Assembly of Single-Walled Carbon Nanotube Interconnects Using Dielectrophoresis,” Nanotechnology, Vol. 18, Issue 39, October 2007, pp. 395204.
    b. The paper is also featured on the cover of the October 2007 print version of  Nanotechnology Journal.
  59. Xiong, Xugang,  Busnaina, Ahmed, Selvarasah, Selvapraba, Somu,  Sivasubramanian, Wei, Ming, Mead, Joey, Chen, Chia-Ling, Aceros, Juan,  Makaram, Prashanth, and Dokmeci, Mehmet R.,  “Directed Assembly of Gold Nanoparticle Nanowires and Networks for Nanodevices,” Appl. Phys. Lett.  Vol. 91, Issue 6, August 2007, pp. 063101 (3).
    a. DOI:10.1063/1.2763967.
    b. selected for the August 20, 2007 issue of Virtual Journal of Nanoscale Science & Technology.
    c. Directed+assembly+of+gold+nanoparticle+nanowires+and+networks+for+nanodevices&possible1zone=article&fromvolume=16&tovolume= 16&fromissue=8&toissue=8&OUTLOG=NO&id=APPLAB000091000006063101000001&viewabs=VIRT01&key=DISPLAY&docID=1&page= 1&chapter=0
  60. Makaram, Prashanth, Somu, Sivasubramanian,  Xiong, Xugang, Busnaina, Ahmed, Jung,Yung Joon, and McGruer, Nick, “Scalable Nanotemplate Assisted Directed Assembly of Single Walled Carbon Nanotubes for Nanoscale Devices,” Appl. Phys. Lett. Vol 90, Issue 24, June 2007, pp. 243108 (3).
  61. Guldiken, Rasim, Makaram, Prashanth, Bakhtari, Kaveh, Park, Jingoo and  Busnaina, Ahmed A., “Nanoparticle Scanning and Detection on Flat and Structured Surfaces Using Fluorescence Microscopy,”  Microscopy Research and Technique,  Vol. 70, Issue 6, June 2007, pp. 534-538.
    a. selected.y=5  
  62. Gultepe, Evin, Nagesha, D.,  Menon, L.,  Busnaina, A. and Sridhar, S., "High-Throughput Assembly of Nanoelements in Nanoporous Alumina Templates," Appl. Phys. Lett. Vol. 90,  Issue 16, April 2007, pp. 163119(3)
  63. Khanduja, Nishant,  Selvarasah, Selvapraba, Chen, Chia-Ling, Dokmeci, Mehmet R.,  Xiong, Xugang, Makaram, Prashanth and Busnaina, Ahmed,  “Three Dimensional Controlled Assembly of Gold Nanoparticles Using a Micromachined Platform,”  Appl. Phys. Lett. 90, Vol. 90 Issue 8, February 2007,  pp. 083105(3). 
  64. Ming Wei, Zhenghong Tao, Xugang Xiong, Myunghwan Kim, Jun Lee, Sivasubramanian Somu, Sandip Sengupta, Ahmed Busnaina, Carol Barry, Joey Mead, “Fabrication of Patterned Conducting Polymers on Insulating Polymeric Substrates by Electric-Field-Assisted Assembly and Pattern Transfer,” J. of Macromolecular Rapid Communications, Vol. 28, No. 2, January 23, 2007, pp. 221.
  65. Hong, Yi-Koan, Han, Ja-Hyung, Kim, Tae-Gon, Park, Jin-Goo, and Busnaina, Ahmed, “The Effect of Frictional and Adhesion Forces Attributed to Slurry Particles on the Surface Quality of Polished Copper,” J. of Electrochem. Soc., 154 (1), pp. H36-H40, (2007).64.
  66. Okutucu, Tuba, Yener, Yaman, and Busnaina, Ahmed A., “Transient Radiative Transfer  in Participating Media with Pulse-laser Irradiation—an Approximate Galerkin Solution,” J of Quantitative Spectroscopy & Radiative Transfer, 103, 1, January, 2007, pp. 118-130.
  67. Xiong, Xugang , Makaram, Prashanth , Busnaina, Ahmed,  Bakhtari, Kaveh, Somu, Sivasubramanian,  McGruer, Nicol, and Park, Jingoo, "Large Scale Directed Assembly of Nanoparticles Using Nanotrench Templates," Appl. Phys. Lett.  Vol 89, Issue 19, November 2006, pp. 193108 -3.
    a. selected for the November 20, 2006 issue of Virtual J of Nanoscale Science & Technology, .
  68. Wei, Ming, Tao, Zhenghong, Xiong, Xugang, Kim, Myunghwan, Lee, Jun, Somu, Sivasubramanian, Sengupta, Sandip, Busnaina, Ahmed, Barry, Carol, and Mead, Joey, “Fabrication of Patterned Conducting Polymers on Insulating Polymeric Substrate by Electric-Field_Assisted Assembly of Conducting Polymers and Patterned Transfer,” J. of Macromolecular Rapid Communications, 2006, vol. 27, No21, pp. 1826-1832.
    a. selected.y=6
  69. Park, Jin-Goo, Lee, Sang-Ho, Ryu, Ju-Suk, Hong, Yi-Koan, Kim, Tae-Gon, and Busnaina, Ahmed A., “Interfacial and Electro-kinetic Characterization of IPA Solutions Related to Semiconductor Wafer Drying and Cleaning,” J. of Electrochem. Soc., 153 (9) G811-G814 (2006).
  70. Kaveh Bakhtari,a Rasim O. Guldiken,a Prashanth Makaram, Busnaina,  Ahmed and   Park, Jin Goo, “Experimental and Numerical investigation of Nanoparticle Removal Using Acoustic Streaming and the Effect of Time,”  J. of Electrochem Soc, 153 (90) G846-G850, (2006).
  71. Busnaina, A., Bakhtari, K., Guldiken, G. and Park, J, “Experimental and Analytical Study of Submicron Particle Removal from Deep Trenches,” J.of Electrochem. Soc., 153 (9) C603-C607, 2006.
  72. Han, Ja-Hyung, Koo, Ja-Eung , Hong, Duk-Ho,  Park, Byung-Lyul, Kim, Seong-Il , Cho, In-Soo, Eom, Dae-Hong , Park, Jin-Goo,  and Busnaina, A., “Effects of Patterns on Corrosion in Cu CMP,” J. of  Solid State Phenomena,  Vols. 103-104,  April 2005, pp. 369-372.
  73. Hong, Yi-Koan,  Han, Ja-Hyung , Lee, Jin-Hyung, Park, Jin-Goo, and  Busnaina, A., “Adhesion and Removal of Alumina Slurry Particles on Wafer Surfaces in Cu CMP,” J. of  Solid State Phenomena Vols. 103-104,  April 2005., pp. 275-278.
  74. Guldiken, O., Bakhtari, K., Busnaina, A., and Park, J., “Metrology and Removal of Nanoparticles from 500 micron Deep Trenches,” J. of Solid State Phenomena, Vol. 103-104, (2005), pp. 137-140.
  75. Lee, Sang-Ho, Kang, Young-Jae,  Park, Jin-Goo,  Busnaina, A.A.,  Lee, Jong-Myung, Kim, Tae-Hoon, Zhang, Guojing, Eschbach, Florence,  and Ramamoorthy, Arun,“Laser Shock Removal of Nanoparticles from Si Capping Layer of EUV Mask,Japanese J. of Appl Phys, Vol. 44, No. 7B, 2005, pp. 5560-64.
  76. Lee, Sang-Ho, Hong, Yi-Koan,  Song, Jae-Hoon,  Park, Jin-Goo, Busnaina, A.A.,
    a. Zhang, Guojing, Eschbach, Florence, and Ramamoorthy, Arun,“ Particle Adhesion and Removal on EUV Mask Layers During Wet Cleaning, ”  Japanese J of Appl Phys, Vol. 44, No. 7B, 2005, pp. 5479-83.
  77. Hong, Yi-Koan, Eom, Dae-Hong, Lee,  Sang-Ho, Kim, Tae-Gon, Park, Jin-Goo, and Busnaina, Ahmed A., "The Effect of Additives in Post Cu CMP Cleaning on Particle Adhesion and Removal," J. of The Electrochem Soc., 151 (11) 2004. G756-G761.
  78. Eom,Dae-Hong, Lim, Geun-Bae, Park,  Jin-Goo, and  Busnaina, Ahmed A.,  “The 
    Reaction of Ozone and H2O2 in Ammonium Hydroxide (NH4OH) Solutions and Their Reaction with Silicon Wafers,” Japanese J. of Applied Physics, Vol. 43, No. 6A, 2004, pp. 3335-3339.
  79. Busnaina A. A.,  Lin H.,  Moumen, N.,  Feng, J.W., and Taylor, J., “ Particle Adhesion and Removal Mechanisms in Post-CMP Cleaning Processes,”  J. of Semiconductor Manufacturing,  IEEE Transactions,  Vol.15, No. 4, November 2002, pp 374-382.
  80. Lin H., Busnaina A. A., and  Suni I. I., “Investigation of Ionic Contamination Removal  from Silicon Dioxide Surfaces,”  Surface Engineering, 2002, vol. 18, no. 3, pp. 233-236(4).
  81. Moumen, N., and Busnaina, A.A., “Removal of Submicrometer Alumina Particles from Silicon Oxide Substrates,”  Surface EngineeringVol. 17,     No. 5, 2001, pp422-424.
  82. Feng, J.W., Busnaina, A.A., and Ryszytiwskyj,  W.P., “Effect of Humidity  and Aging on Adhesion and Removal of Glass Particles from FPD Glass,” Surface Engineering,   Vol. 17, No. 5, 2001, pp425-429.
  83. Rimai, D. S., Quesnel, D. J. and Busnaina, A. A., "The Adhesion of Dry Particles in the Nanometer to Micrometer-size Range," Int’l J. of Colloids and Surfaces A, Vol. 165, 2000, pp. 3-10.
  84. Busnaina, A., and Elsawy, T., “The Effect of Relative Humidity on Particle Adhesion and Removal,” J. of Adhesion, 2000. Vol. 74, pp. 391-409.
  85. Tang, J., and Busnaina, “The  Effect of Time and Humidity on Particle     
    Adhesion and Removal,” J. of Adhesion, 2000, Vol. 74, pp. 411-419.
  86. Zhang, F., Busnaina, A. A. and Fury, M., "The Removal of Deformed Submicron Particles from Silicon Wafers Using Spin Rinse and Megasonics," J. of Electronic Materials, Vol. 29, No.2, 2000,pp. 199 ‑ 204.
  87. Zhang, F. and Busnaina, A. A., "Submicron Particle Removal in Post-oxide Chemical-mechanical Planarization (CMP) Cleaning," J.of Applied Physics A 69 (1999) 4, 437-440.
  88. Suni, I. I., Gale, G.W. and Busnaina, A. A., “Dissolution of Atomic, Molecular and Ionic Contamination from Silicon Wafers During Aqueous Processing,J. of Electrochem Soc., Vol. 146, 3522 No. 9, 1999.        
  89. MacGibbon, B.S., Busnaina, A. A., and Fardi, B., “The Effect of Thermophoresis on Particle Deposition in a Low Pressure Chemical Vapor Deposition Reactor,” J. of Electrochem Soc., Solid State Science and Technology, Vol. 146, No. 8, pp. 2901-2905, 1999.
  90. Busnaina, A. A. and Gale, G. W, "Roles of Cavitation and Acoustic Streaming in Megasonic Cleaning," Journal of Particulate Science and Technology, Vol. 17, No. 3, pp. 229-238, 1999.
  91. Zhang, F., Busnaina, A. and Ahmadi, G., “Particle Adhesion and Removal in Chemical Mechanical Polishing (CMP) and post-CMP Cleaning,” J. of Electrochem Soc., Vol. 146, No. 7, 1999. pp. 2665-2669 
  92. Busnaina, A. A., and Elsawy, T., "The Effect of Relative Humidity on Particle Adhesion and Removal," J. of Adhesion, December 1999.
  93. MacGibbon, B.S., Busnaina, A. A. and Rasmussen, D. H., “Particulate Contamination in Tungsten LPCVD: An Experimental Study,”J. of Vacuum Science and Technology B, 17(2), Mar/Apr, 1999, pp. 443-447.
  94. Zhang, F. and Busnaina, A., “The Role of Particle Adhesion and Surface Deformation in Chemical Mechanical Polishing,” Electrochemical and Solid-state Letters, Vol. 1, No. 4, October 1998.
  95. Busnaina, A. A. and Elsawy, T. M., "Post-CMP Cleaning Using Acoustic Streaming," J. of Electronic Materials, Vol. 27, No. 10, 1998,  pp. 1095-1098.
  96. Busnaina, A. A., and Dai, F., "The Removal of Submicron Particles in Liquid-based Cleaning," J. of Adhesion, vol. 67, 1998, pp. 181-193.
  97. Gale, G., Busnaina, A. A., and Zaazhoa "A Visualization Technique for Film Flow Coverage," Chemical Engineering Communications,  vol. 165,  pp. 167‑176, 1998.
  98. Chopra, D., Suni, I. I., and Busnaina, A., “Cu Dissolution From Si(111) into an SC-1 Process Solution,J. of Electrochem Soc., Vol. 145, L60 No. 4, April, 1998.
  99. Busnaina, A. A. and Gale, G. W, "Removal of Silica Particles from Silicon
    Substrates Using Megasonics Cleaning," J of Particulate Science and Technology, Vol 15, 3/4, 361-370,1997.
  100. Busnaina, A. A., “The Removal of Small Particles Using High Frequency Ultrasonics,J of the Acoustical Society of America, Vol. 100, No. 4, pp. 2775, October 1996.
  101. Busnaina, A. A., "Particle-substrate Collisions, Particle Rebound and Removal,"  J. of Adhesion, vol. 51, 1995, pp. 167-180.
  102. Gale, G. W.  and   Busnaina, A. A., "Removal of Particulate Contaminants Using Ultrasonics and Megasonics: A Review,J. of Particulate Science and Technology, vol. 13, 1995, pp. 197-211.
  103. Rimai, D. S. and  Busnaina, A. A., "The Adhesion and Removal of Particles from Surfaces,J. of Particulate Science and Technology, Vol. 13, 1995, pp. 249-270.
  104. Busnaina, A. A.,  Kashkoush, I. I., and  Gale, G. W., "An Experimental Study of Megasonic Cleaning of Silicon Wafers,"J. of  Electrochemical  Society, vol. 142, No. 8, August 1995, pp. 2812-2817.
  105. Krishnan, S., Busnaina, A. A., Rimai, D. S. and DeMejo, D. P., "The Adhesion-induced Deformation and the Removal of Submicrometer Particles," J. of Adhesion Science and Technology, vol. 8, No. 11, 1994, pp. 1357‑1370.
  106. Busnaina, A. A. and Kashkoush, I., "The Effect of Time, Temperature and Particle Size on Submicron Particle Removal Using Ultrasonic Cleaning," Chemical Engineering Communications, vol. 125, 1993, pp. 47-61.
  107. Kashkoush, I. and Busnaina, A. A., "Submicron Particle Removal Using Ultrasonic Cleaning," J. of Particulate Science and Technology, vol. 11, 1993, pp. 11‑24.
  108. Busnaina, A. A., Taylor, J. and Kashkoush, I., "Measurements of Adhesion and Removal Forces of Submicron Particles on Silicon Surfaces, " J. of Adhesion Science and Technology, vol. 7, No. 5, 1993, pp. 441‑455.
  109. Busnaina, A. A., Zheng, X. and Zhu, X., "Three‑dimensional Computer Simulation of Gas Flow and Particle Transport in a Horizontal Diffusion Furnace," J. of Environmental Sciences, March 1993, pp. 25‑32.
  110. Sharif, M. A. R and Busnaina, A. A., "Evaluation and Comparison of Bounding Techniques for Convection‑diffusion Problems," J. of Fluids Engineering, vol. 115, No. 1, March, 1993, pp. 33‑40.
  111. Abuzeid, S., Busnaina, A. A. and Ahmadi, G., "Wall Deposition of Small Suspended Particles in a Turbulent Channel Flow," J. of Particulate Science and Technology, vol. 10, No. 2, 1992, pp. 209‑225.
  112. Abuzeid, S., Busnaina, A. A., and Ahmadi, G., "Wall Deposition of Aerosol Particles in a Turbulent Channel Flow," J. of Aerosol Science, vol. 22, 1991, pp. 43‑62.
  113. Busnaina, A. A., Zheng X. and Sharif, M.A.R., "A Modified Skew Upwind Scheme for Fluid Flow and Heat Transfer Computations," J. of Applied Mathematical Modelling, vol. 15, No.8, August 1991, pp. 425‑432.
  114. Abuzeid, S., Busnaina, A. A., and Ahmadi, G., "Eulerian and Lagrangian Simulation of Particle Deposition from a Point Source in a Turbulent Channel Flow," J. of Particulate Science and Technology, Vol. 8, No. 3‑4, 1990, pp. 137‑166.
  115. Sharif, M. A. R. and Busnaina, A. A., "Modeling of Lateral Jets Injected into Swirling Crossflow," Chemical Engineering Communications, vol. 78, 1989, pp. 213‑232.
  116. Busnaina, A. A., Edler, J., Gale, G. and Kern, F. W., "A Fluid Dynamics Study of Microcontaminant Particle Removal from Silicon Wafers," J. of Environmental Sciences, vol. 32, No. 1, January 1989, pp. 46‑52.
  117. Sharif, M. A. R and Busnaina, A. A., "Assessment of Finite Difference Approximations for the Advection Terms in the Simulation of Practical Flow Problems," J. of Computational Physics, Vol. 74, 1988, pp. 143‑176.
  118. Sharif, M. A. R and Busnaina, A. A., "An Investigation into the Numerical Dispersion Problem of the Skew Upwind Finite Difference Scheme," Applied Mathematical Modelling,  Vol. 12, April 1988, pp. 98‑108.
  119. Busnaina, A. A., Ahmadi, G. and Chowdhury, S. J., "A Two‑equation Turbulence Model Consistent with the Second Law," AIAA Journal, Vol. 25, No. 12, 1987, pp. 1543-1544.
  120. Busnaina, A. A., "Lateral Jet Injection into Isothermal Combustor Flowfields," Chemical Engineering Com­munications, Vol. 54, 1987, pp. 265‑278.
  121. Busnaina, A. A., and Lilley, D.G., "A Basic Code for the Prediction of Transient Three‑dimensional Turbulent Flowfield," Chemical Engineering Communications, Vol. 26, 1984, pp 89‑104. 
  122. Busnaina, A. A., and Lilley, D. G., "Numerical Simulation of Swirling Flow in a Cyclone Chamber," Chemical Engineering Communications, Vol. 26, Feb. 1984, pp. 73‑88.
  123. Busnaina, A. A., and Lilley, D. G., "Computer Prediction of Local Destratification near Low‑Level Release Structure of Reservoirs," J. of Fluids Engineering, vol.105, March, 1983, pp. 65‑70.
  124. Gupta, A. K., Beer, J. M., Louis, J. F., Busnaina, A. A., and Lilley, D. G., "Flow Aerodynamics Modeling of an MHD Swirl Combustor: Calculations and Experimental Verification," J. of Fluids Engineering, Vol. 104, Sept. 1982, pp. 385‑392.
  125. Busnaina, A. A., Lilley, D. G., and Moretti, P. M., "Prediction of Local Destratification of Lakes," J. of the Hydraulics Division, ASCE, Vol. 107, March 1981, pp. 259-272.




Ahmed A Busnaina

Professor and Director
Department of Mechanical & Industrial Engineering
Northeastern University
Boston, Massachusetts, USA
Phone: (617) 373-2992